Micro-LED Quality Validation

Enabling testing, repair, and replacement of micro devices integrated into a system substrate like an emissive display. It provides methods and structures for identifying, fixing, and replacing defective micro devices in integrated systems like displays. The methods involve using temporary electrodes to bias and test floating contacts, optical sensors to measure light output, and fuses to disconnect defective devices. The structures include spare circuits, repair pads, and defect mapping blocks for populating and connecting replacements.

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Repairing techniques for micro LED displays to increase yield and reduce cost when defective micro LEDs are found after transfer to the system substrate. The techniques include replacing defective micro LEDs with spare ones, converting color of spares to match defects, mapping spare locations, and spatial coordinate variation to mitigate visual artifacts. It also involves calibration to correct for spatial non-uniformity induced by repair techniques.

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Transferring microdevices like LEDs from a donor substrate to a receiver substrate in a way that avoids defects and performance issues. The technique involves arranging the microdevices in cartridges, aligning the cartridges with a template, bonding them, then transferring the devices from the template to the receiver substrate. This allows selective transfer of defect-free devices from cartridges rather than transferring entire blocks from the donor substrate. The cartridges can also have anchors to hold the devices during transfer and vias for temperature and mechanical property adjustment. By testing the cartridges and adjusting transfers based on defect data, it reduces defects in the final receiver substrate.

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Micro-LEDs are suitable as special light sources that serve small sensors and for optical communication. The most important technology these applications is Micro-LED high-precision transfer (0.5 m positional accuracy). existing has the problem of low position accuracy. This study proposes a high-position-precision method based on vibrations. A single system microgripper was designed to achieve positioning. Compared with other methods, this can be used in conjunction microscope camera Micro-LED. To test performance our proposed method, Micro-LED, length approximately 40, width 20, thickness 4 m, transferred. tested. Subsequently, 5 6 array results show 2 out 30 have deviation exceeding 3 so failure. success rate >90%. root-mean-square error 0.8 m. experimental exhibits good transfers.

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Abstract MicroLED is considered as the new generation of display with longlifetime, high contrast and brightness, splicing capability, so forth. Mass transfer bottleneck that limits manufacturing at large volume, due to factors such laserlift off, pickup, metal bonding. Metal bonding between chip substrate one most important lightup yield. To solve key thermal mismatch issue backplane donor during heating, laserassisted process could be a viable solution. We present study in metallic element Au/Sn productivity, capability low cost, well good electrical conductivity, excellent strength, sensitivity surface roughness. The result presented 62 78 pixels fullcolor display, reliable connection microscale LED devices can achieved under 250C without any damage backplane. In conclusion, micromorphology formation mechanism different alloy phase compositions welded elements have been thoroughly studied, feasible technological methodology has developed for upcoming mass production modules.

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MicroLED display technology with improved yield and production efficiency by selectively removing defective microLEDs before transfer to the final substrate. The method involves testing the microLEDs on a temporary substrate, removing any failures, and then transferring the remaining good microLEDs to the permanent display substrate. This prevents filling gaps with extra microLEDs, which can have lower yield. The key is controlling the transfer and removal rates so more defective microLEDs are removed than replaced.

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Micro light-emitting diode (Micro-LED) is widely regarded as a highly promising technology in the current display field due to its excellent performance, but core issue hindering further development of Micro-LED how achieve high-precision and high-yield transfer. In this study, laser-induced forward transfer (LIFT) adopted main technique, novel blister-type dynamic release layer (DRL) material selected, characterized by gentle process minimal residue on chip after Chip-on-wafer (COW) structure that fabricates large number Micro-LEDs (15 30 m2) sapphire substrate. The COW-on-head (COH) bonding method can control uniformity overall height before within 3.5%, which favorable for subsequent stable Based analysis close relationship between gap laser energy density, study successfully achieved red/green/blue (R/G/B) chips (6400, respectively) onto corresponding chip-on-carrier 2 (COC-2), all them have one-step yield over 99.3% an average offset m or less. It worth mentioning mentioned paper different from testing repairing chips. fully reflect quality. order verify validity 1 in., f... Read More

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Abstract Microlight emitting diode (LED) based LED on silicon (LEDoS) is a promising candidate for nextgeneration AR and VR displays due to superior pixel performance potential high resolution. Traditional RGB pixels are placed single plane, which limits the To overcome this, vertically stacked using heterogeneous monolithic 3D integration (M3D) have been explored. However, previously reported vertical LED not considered heat dissipation capability of pixels, indeed important in future micro displays, utilized materials incompatible with standard CMOS processes, further limiting their practicality LEDoS. The critical regions constraint, bonding medium, typically organic polymer materials. Therefore, handle issue, fullcolor LEDs demonstrated oxide (SiO 2 ) yttrium (Y O 3 ), as mediums. These CMOScompatible offer thermal conductivity at least 10 times higher than conventional polymers. InGaN/GaN blue bonded oxides show improved management, leading external quantum efficiency (EQE) better color characteristics, including narrower full width half maximum (FWHM) purity. ... Read More

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Testing large arrays of devices like microLED displays using parallel excitation with repeated contact and interaction without damaging the probes or devices. The test tool has multiple probes that can simultaneously contact multiple device contacts. Liquid metal is applied to the probe tips before contact to act as a flexible interface. When the probes touch the device contacts, oxide pinholes form in the contact layer allowing electrical connection through the liquid metal bridge. This allows repeated contact without damaging the probes or devices. The liquid metal seals when the probes lift, preventing flow onto the contacts. This enables parallel device excitation with optical monitoring without active feedback loops to maintain probe-contact alignment.

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A test system for efficiently and accurately measuring the performance of small form factor LEDs like micro-LEDs and nano-LEDs. The system uses a probe head with obliquely angled probes that can contact the tiny LEDs without blocking emitted light. It also has a movable cover over the probe slot to protect the probes when not in use. The probes measure voltage and current through the LEDs while a separate light detector captures emitted light. This allows calculating the quantum efficiency based on all three parameters.

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Determining quality of inspection data using a machine learning model that can distinguish between defective and non-defective products without requiring labeled training data for defective products. The method involves generating training data from non-defective products, learning the ML model on that, preparing a feature spectrum from a specific layer output for non-defective training data, and using that learned model and feature spectrum to determine quality of unseen inspection data. Similarity between the inspection data feature spectrum and the known feature spectrum is calculated and a threshold is used to determine if it's non-defective or defective.

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Contactless probe for measuring cycles of microdevices like LEDs without needing post-processing steps. The probe has an electrode covering a dielectric to stimulate the microdevice capacitively. A switch keeps the device on after an active portion of the stimulus signal. This allows measuring cycles without contact, resets, or parasitic effects. The stimulus amplitude can also be increased after each cycle.

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Detecting defects in display panels using deep learning to accurately locate and identify the type of defect in a stacked structure of a display panel. The method involves collecting images of defects and layers from a database, learning the defect and layer information using a deep learning model, and then using that model to extract the location of the defect in the stacked structure. The deep learning allows detecting detailed defect locations and layer associations compared to just checking for defects in a single image.

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Display device with improved reliability by adding inspection lines that overlap the cathode-power electrode connection regions to check for defects. The inspection lines are disposed on the encapsulation layer covering the display pixels. They overlap the cathode-power connections and allow capacitance measurements to determine if the connections are stable. If the measured capacitance is within a range, it indicates good connection. If outside the range, it indicates defective connection. This provides a reliability check for the cathode-power connections to prevent issues like noise leakage through poorly connected cathodes.

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Pixel circuit for display devices that allows simultaneous driving and sensing of electrical characteristics of multiple driving transistors for a pixel to improve reliability, efficiency, and HDR contrast. The circuit has two driving transistors connected to the pixel's light-emitting element and a sensing part to simultaneously drive one transistor while sensing the electrical characteristics of the other transistor. This allows real-time monitoring of transistor performance while simultaneously emitting light. It enables selection of the best performing transistor for driving the light-emitting element and detects deterioration early. The simultaneous emission of light from both transistors increases luminance with less current and improves display performance.

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Self-monitoring method for displays to detect abnormalities without manual intervention. The method involves inputting a test image, extracting display parameters for each frame of the displayed test image, comparing the parameters between frames to find variations, and determining if display abnormalities are present based on the parameter comparisons. By feeding back test images with known variations, the display can learn normal parameter ranges and detect aberrations.

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Detecting defective pixels in an image array using statistical analysis on sets of surrounding pixels. For each pixel, a cell with neighboring pixels is analyzed statistically. If the statistical distance of the pixel from the cell exceeds a threshold, it indicates a defective pixel. This provides a way to detect defective pixels without relying on calibration or edge detection, as the statistical outlier can be identified on-the-fly during image processing.

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Predicting defects in assembly units using machine learning techniques to enable real-time yield protection in optical inspection systems. The method involves extracting features from inspection images, generating vectors, labeling clusters based on inspection outcomes, and propagating defect labels upstream to detect anomalous regions in new assembly units. It uses machine learning to identify common features associated with proper function versus defects, and can assist in confirming defects by comparing against these feature sets.

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Display apparatus with improved diagnostics for microLED displays. It allows detecting panel issues during vertical blank periods when the display is off. The display has multiple microLED drivers with timings controlled by separate clock signals. During blanking, all clock signals go low to disable emitting in all pixels. This lets detecting abnormalities like stuck pixels.

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A method for non-destructively detecting LEDs bonded to a display substrate using a light source and a sensor. The method involves irradiating the LEDs with light from the source and measuring the emitted light with the sensor. By analyzing the spectral characteristics of the emitted light, the quality and performance of the LEDs can be assessed without physically contacting or damaging them. The method enables high-precision LED detection without requiring expensive equipment like lasers or probes.

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